Wafergard® GTL In-line Gas Filters
Reliably remove particles from inert gases with flow rates up to 80 slpm.
- Provide efficient, low-cost, point-of-use filtration of inert gases
- >99.9999999% removal of all particles greater than 0.0015 µm diameter
Wafergard® GTL In-line Gas Filters Applications
- Low air intake filter
- Wafer transport systems
- Clean dry air (CDA)
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