Wafergard® II F Mini XL In-line Gas Filters
Superior particulate filtration in gas panels, gas cabinets, and anywhere ultrapure gas is required for wafer processing.
- Compact unit reduces overall gas box footprint, saving valuable equipment space
- PTFE membranes provide high-efficiency filtration, improving product yield
- Low pressure drop reduces the risk of condensation in low vapor pressure gases
- Excellent compatibility with all classes of semiconductor process gases
- For use with inert and reactive gases, including ozone
Wafergard® II F Mini XL In-line Gas Filters Applications
- Ozone applications (gas)
- Gas cabinets
- Ultrapure gas systems
- Valve manifold boxes
- Gas panels
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