Wafergard® II SF Half In-line Gas Filters
Wafergard® II SF Half In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.
- State-of-the-art housing assembly eliminated outgassing by minimizing weld area.
- The all-metal construction is ideal for high temperature and dynamic pressure applications.
- Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.
Wafergard® II SF Half In-line Gas Filters Applications
- Bulk Gas Delivery
- Photolithography
- Deposition
- Dry Etch
- Ion Implantation
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