Wafergard® III NF-30 In-line Gas Filters
Offer superior particulate filtration for ultrapure gas system filtration.
- All metal construction provides the cleanest, most efficient all-metal filters available
- Patented nickel filter membrane offers superior corrosion resistance and excellent chemical compatibility
- Innovative housing design helps eliminate outgassing and reduces drydown time
- Ideal for high-temperature and dynamic-pressure applications
- Typically used for flows up to 30 slpm
Wafergard® III NF-30 In-line Gas Filters Applications
- Bulk gas delivery
- Photolithography
- Deposition
- Dry etch
- Ion implantation
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