Provides superior particulate filtration for ultrapure gas systems with flows up to 750 slpm.

• Cleanest, most efficient all-metal filters available
• Patented nickel filter membrane
• Superior corrosion resistance
• Ideal for high-temperature and dynamic-pressure applications
• Typically used for flows up to 750 slpm

Wafergard® III NF-750 In-line Gas Filters Applications

• Ultrapure gas lines
• High temperatures applications
• Valve-manifold boxes
• New fab construction
• Upgrade of existing fluoropolymer filters
• Spin rinse dryers
• Inert and reactive gases
• Bulk gas
• Vapor phase gas