These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.

• PTFE filter element excels in ultrapure applications 
• Designed for high-flow and low-delta pressure applications 
• For use with inert and reactive gases, including ozone 
• Pre-conditioned for fast startup (silver only) 

Wafergard® MAX In-line PTFE Gas Filters Applications

• Compatible with all classes of semiconductor process gases
• Compatible with general nitrogen and CDA applications