Wafergard GN Gas Filter Gun

This easy-to-use, lightweight gas filter gun is designed for POU filtration of compressed gas in semiconductor applications.

• PTFE membrane eliminates particle shedding and is rated for 0.003 μm particle retention in gas applications
• Provides 10 cm² of effective filtration area, enabling high flow rates and more effective wafer cleaning
• The filter element is 100% pretested and preflushed to assure reliable performance
• White nylon construction is resistant to corrosion in acid and most solvent applications

Wafergard® GN Gas Filter Gun Applications

• Bulk Gas Delivery
• Deposition
• Dry Etch
• Ion Implantation
• Photolithography