Wide-Range Vacuum Gauges

Single gauge solution for increased accuracy from atmosphere to high vacuum.

VersaTorr extends the performance of MEMS-based vacuum gauge measurement by combining advances in Micro-Pirani/Piezo sensor design with active temperature compensation and advanced digital signal processing to greatly enhance the accuracy and working range by up to 3 decades.

KEY APPLICATIONS

• Load locks
• Transfer chambers
• Forelines
• Vacuum roughing lines
• Thin film processing

PRODUCTS