GateKeeper GPU Ozone Gas Purifiers
Our advanced gas purification technology efficiently reduces solid and volatile metals such as chromium (Cr) and manganese (Mn) from ozone gas.
- Advanced gas purification technology enables a >99% volatile efficiency removal rating for Cr, significantly reducing the conditioning time required for the ozone gas delivery system
- Integrated PTFE/PFA filter removes particles immediately after media purification, reducing wafer particles and eliminating the need for an independent filter
- Compact, in-line design with gasket seal enables fast, easy installation
GateKeeper® GPU Ozone Gas Purifiers Applications
- Chemical vapor deposition (CVD) tools
- Dry etching/ashing tools
- Wet etch and clean (WEC) tools
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